 |
| SYSTEM |
| SYSTEM MODEL |
DESCRIPTION |
| OP2600 |
BPR (Beam Profile Reflectrometry : thick dielectric films > 500A)
BPE (Beam Profile Ellipsometry : thin dielectric films < 500A)
Spectrometry (High Index films : C-Si, Poly-Si, A-Si) |
|
| SYSTEM MODEL |
DESCRIPTION |
| OP2600DUV |
' + UV Spectrometer |
|
| SYSTEM MODEL |
DESCRIPTION |
| OP2600I |
SMIF Indexer (not normal open cassette) |
|
| SYSTEM MODEL |
DESCRIPTION |
| TP420 & TP500 |
Non-destructive Ion Implanter Dose Monitoring Systems |
|