| SYSTEM MODEL | DESCRIPTION |
| OP2600 | BPR (Beam Profile Reflectometry : thick dielectric films > 500A) BPE (Beam Profile Ellipsometry : thin dielectric films < 500A) Spectrometry (High Index films : C-Si, Poly-Si, A-Si) |
| SYSTEM MODEL | DESCRIPTION |
| OP2600DUV | ‘+ UV Spectrometer |
| SYSTEM MODEL | DESCRIPTION |
| OP2600I | SMIF Indexer (not normal open cassette) |
| SYSTEM MODEL | DESCRIPTION |
| TP420 & TP500 | Non-destructive Ion Implanter Dose Monitoring Systems |