Therma Wave MOTOR & STAGE
| TWI OEM PART No. | DESCRIPTION | PROTOP PART No. |
|---|---|---|
| – | Chopper Motor | |
| 66-006790 | Motor,60.5:1,W/05/32SHFT,G/BOX | PROTOP PN : PT71-006795 |
| 18-008100 | Motor Assembly,LNR,LARGE | PROTOP PN : PT23-008105 |
| 18-013521 | Motor Assembly,X/Y/THETA,8X12 | PROTOP PN : PT23-013526 |
| 18-015449 | Motor Assembly,THETA,OP2600 | PROTOP PN : PT23-015454 |
| 18-015450 | Motor Assembly,X/Y,OP2600 | PROTOP PN : PT23-015455 |
| 18-018237 | MOTOR ASSY, THETA P34 | |
| 18-018354 | MOTOR ASSY, Coarse Z motor | PROTOP PN :PT23-018359 |
| 18-122551 | MOTOR ASSY, Coarse Z motor | PROTOP PN : PT23-122556 |
| 18-020061 | Motor Assembly,Lens Exchange,P34 | PROTOP PN : PT23-020066 |
| 66-007434 | Motor,Stepper,Theta Stage,P20 | PROTOP PN : PT71-007439 |
| 66-008527 | Motor,Stepper,X,Y | PROTOP PN : PT71-008532 |
| 66-019250 | MOTOR,DC W/ENCODER CBL PINOUT | |
| 66-019878 | Motor,DC,Y-Stage,TP500 | |
| 66-019879 | Motor,DC,X-Stage,TP500 | |
| 66-023090 | Motor/TACH,Y-Stage,TP630 | |
| 66-023091 | Motor/TACH,X-Stage,TP630 | |
| 66-014312 | Motor | |
| 66-014312 | Motor | |
| 18-014027 | STAGE ASSY,THETA,TP500 | |
| 18-006566 | Stage Assembly,Rotary,6X8,TC | |
| 18-007438 | Stage Assembly,Rotary,3IN | |
| 18-012511 | X,Y stage TP500 | |
| 18-013519 | Stage Assembly,X/Y/THETA,8X12 | |
| 18-013520 | STAGE ASSY,X/Y,8×12 | |
| 18-013872 | STAGE ASSY,X/Y,8×8,OP | |
| 18-013873 | STAGE ASSY, ROTARY 5IN OPTO | |
| 18-014027 | STAGE ASSY,THETA,TP500 | |
| 18-014115 | Fine-Z and Theta Assembly, P34 | |
| 18-015517 | STAGE ASSY,X/Y,8X8,PACT,OP | |
| 18-015519 | STAGE ASSY,ROTARY,5IN,OPTO | |
| 18-015933 | STAGE ASSY, THETA TP500 | |
| 18-017259 | Stage Assembly,X,Y,THETA,OP3260 | |
| 18-017260 | STAGE ASSY,X/Y,8X8,OP3260 | |
| 18-017334 | STAGE ASSY,ROTARY,OP3260 | |
| 18-017578 | Stage Assembly,X/Y/THETA,8X12,DUV | |
| 18-017579 | STAGE ASSY,X/Y,8X12,DUV | |
| 18-019495 | Stage Assembly,THETA,NEW BD,TP500 | |
| 18-019496 | Stage Assembly,X,Y&THETA,NEWBD,T50 | |
| 18-021230 | STAGE ASSY,X/Y/CRS Z | |
| 18-021398 | Assy, Theta, Fine Z, T41 | |
| 18-021701 | STAGE ASSY,X/Y/CRS Z | |
| 31-003538 | Stage,Rotary,6X8 | |
| 45-009353 | Stage,Rotary,6IN CHUCK,P20 (or Glass) |