{"id":223,"date":"2026-05-20T07:56:11","date_gmt":"2026-05-20T07:56:11","guid":{"rendered":"https:\/\/protop.co.kr\/?page_id=223"},"modified":"2026-05-20T07:56:11","modified_gmt":"2026-05-20T07:56:11","slug":"therma-wave-motor-stage","status":"publish","type":"page","link":"https:\/\/protop.co.kr\/?page_id=223","title":{"rendered":"Therma Wave MOTOR & STAGE"},"content":{"rendered":"\n
\"\"<\/figure>\n\n\n\n

Therma Wave MOTOR & STAGE<\/strong><\/p>\n\n\n\n

TWI OEM PART No.<\/th>DESCRIPTION<\/th>PROTOP PART No.<\/th><\/tr><\/thead>
–<\/td>Chopper Motor<\/td><\/td><\/tr>
66-006790<\/td>Motor,60.5:1,W\/05\/32SHFT,G\/BOX<\/td>PROTOP PN : PT71-006795<\/td><\/tr>
18-008100<\/td>Motor Assembly,LNR,LARGE<\/td>PROTOP PN : PT23-008105<\/td><\/tr>
18-013521<\/td>Motor Assembly,X\/Y\/THETA,8X12<\/td>PROTOP PN : PT23-013526<\/td><\/tr>
18-015449<\/td>Motor Assembly,THETA,OP2600<\/td>PROTOP PN : PT23-015454<\/td><\/tr>
18-015450<\/td>Motor Assembly,X\/Y,OP2600<\/td>PROTOP PN : PT23-015455<\/td><\/tr>
18-018237<\/td>MOTOR ASSY, THETA P34<\/td><\/td><\/tr>
18-018354<\/td>MOTOR ASSY, Coarse Z motor<\/td>PROTOP PN :PT23-018359<\/td><\/tr>
18-122551<\/td>MOTOR ASSY, Coarse Z motor<\/td>PROTOP PN : PT23-122556<\/td><\/tr>
18-020061<\/td>Motor Assembly,Lens Exchange,P34<\/td>PROTOP PN : PT23-020066<\/td><\/tr>
66-007434<\/td>Motor,Stepper,Theta Stage,P20<\/td>PROTOP PN : PT71-007439<\/td><\/tr>
66-008527<\/td>Motor,Stepper,X,Y<\/td>PROTOP PN : PT71-008532<\/td><\/tr>
66-019250<\/td>MOTOR,DC W\/ENCODER CBL PINOUT<\/td><\/td><\/tr>
66-019878<\/td>Motor,DC,Y-Stage,TP500<\/td><\/td><\/tr>
66-019879<\/td>Motor,DC,X-Stage,TP500<\/td><\/td><\/tr>
66-023090<\/td>Motor\/TACH,Y-Stage,TP630<\/td><\/td><\/tr>
66-023091<\/td>Motor\/TACH,X-Stage,TP630<\/td><\/td><\/tr>
66-014312<\/td>Motor<\/td><\/td><\/tr>
66-014312<\/td>Motor<\/td><\/td><\/tr>
18-014027<\/td>STAGE ASSY,THETA,TP500<\/td><\/td><\/tr>
18-006566<\/td>Stage Assembly,Rotary,6X8,TC<\/td><\/td><\/tr>
18-007438<\/td>Stage Assembly,Rotary,3IN<\/td><\/td><\/tr>
18-012511<\/td>X,Y stage TP500<\/td><\/td><\/tr>
18-013519<\/td>Stage Assembly,X\/Y\/THETA,8X12<\/td><\/td><\/tr>
18-013520<\/td>STAGE ASSY,X\/Y,8×12<\/td><\/td><\/tr>
18-013872<\/td>STAGE ASSY,X\/Y,8×8,OP<\/td><\/td><\/tr>
18-013873<\/td>STAGE ASSY, ROTARY 5IN OPTO<\/td><\/td><\/tr>
18-014027<\/td>STAGE ASSY,THETA,TP500<\/td><\/td><\/tr>
18-014115<\/td>Fine-Z and Theta Assembly, P34<\/td><\/td><\/tr>
18-015517<\/td>STAGE ASSY,X\/Y,8X8,PACT,OP<\/td><\/td><\/tr>
18-015519<\/td>STAGE ASSY,ROTARY,5IN,OPTO<\/td><\/td><\/tr>
18-015933<\/td>STAGE ASSY, THETA TP500<\/td><\/td><\/tr>
18-017259<\/td>Stage Assembly,X,Y,THETA,OP3260<\/td><\/td><\/tr>
18-017260<\/td>STAGE ASSY,X\/Y,8X8,OP3260<\/td><\/td><\/tr>
18-017334<\/td>STAGE ASSY,ROTARY,OP3260<\/td><\/td><\/tr>
18-017578<\/td>Stage Assembly,X\/Y\/THETA,8X12,DUV<\/td><\/td><\/tr>
18-017579<\/td>STAGE ASSY,X\/Y,8X12,DUV<\/td><\/td><\/tr>
18-019495<\/td>Stage Assembly,THETA,NEW BD,TP500<\/td><\/td><\/tr>
18-019496<\/td>Stage Assembly,X,Y&THETA,NEWBD,T50<\/td><\/td><\/tr>
18-021230<\/td>STAGE ASSY,X\/Y\/CRS Z<\/td><\/td><\/tr>
18-021398<\/td>Assy, Theta, Fine Z, T41<\/td><\/td><\/tr>
18-021701<\/td>STAGE ASSY,X\/Y\/CRS Z<\/td><\/td><\/tr>
31-003538<\/td>Stage,Rotary,6X8<\/td><\/td><\/tr>
45-009353<\/td>Stage,Rotary,6IN CHUCK,P20 (or Glass)<\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"

Therma Wave MOTOR & STAGE TWI OEM PART No. DESCRIPTION PROTOP PART No. – Chopper Motor 66-006790 Motor,60.5:1,W\/05\/32SHFT,G\/BOX PROTOP PN : PT71-006795 18-008100 Motor Assembly,LNR,LARGE PROTOP PN : PT23-008105 18-013521 Motor Assembly,X\/Y\/THETA,8X12 PROTOP PN : PT23-013526 18-015449 Motor Assembly,THETA,OP2600 PROTOP PN : PT23-015454 18-015450 Motor Assembly,X\/Y,OP2600 PROTOP PN : PT23-015455 18-018237 MOTOR ASSY, THETA P34 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-223","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/protop.co.kr\/index.php?rest_route=\/wp\/v2\/pages\/223","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/protop.co.kr\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/protop.co.kr\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/protop.co.kr\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/protop.co.kr\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=223"}],"version-history":[{"count":1,"href":"https:\/\/protop.co.kr\/index.php?rest_route=\/wp\/v2\/pages\/223\/revisions"}],"predecessor-version":[{"id":225,"href":"https:\/\/protop.co.kr\/index.php?rest_route=\/wp\/v2\/pages\/223\/revisions\/225"}],"wp:attachment":[{"href":"https:\/\/protop.co.kr\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=223"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}